Goods & Services Description
Machines and Equipment for plasma-assisted manufacturing or plasma treatment of workpieces such as semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices (like LED and OLED), namely, Vacuum treatment systems for plasma-assisted deposition, plasma treatment and plasma etching, in particular vacuum systems for thin film coating (especially PECVD, PACVD) | vacuum dry etching equipment, plasma treatment equipment, parallel plate reactors | Instruments and Sensors for the electrical, optical, material specific characterization of semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices (Instruments such as plasma monitors, gas analyzers, measuring sensors) | Instruments for controlling production processes and product quality of semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices | Installation of plants with Machines and Equipment for plasma-assisted manufacturing or plasma treatment of workpieces such as semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices as well as their maintenance and repair | Scientific services and research work, namely, construction, design and analysis of plasma processes, semiconductor products, vacuum treatment systems for plasma-assisted manufacturing and treatment proceses
